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Design, Fabrication, and Dynamic Environmental Test of a Piezoresistive Pressure Sensor.
Micromachines (Basel). 2022 Jul 19;13(7):1142. doi: 10.3390/mi13071142.
Micromachines (Basel). 2022.
PMID: 35888959
Free PMC article.
A Direct-Reading MEMS Conductivity Sensor with a Parallel-Symmetric Four-Electrode Configuration.
Liao Z, Jing J, Gao R, Guo Y, Yao B, Zhang H, Zhao Z, Zhang W, Wang Y, Zhang Z, Xue C.
Liao Z, et al.
Micromachines (Basel). 2022 Jul 21;13(7):1153. doi: 10.3390/mi13071153.
Micromachines (Basel). 2022.
PMID: 35888969
Free PMC article.
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