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Novel Photonic Applications of Silicon Carbide.
Materials (Basel). 2023 Jan 22;16(3):1014. doi: 10.3390/ma16031014.
Materials (Basel). 2023.
PMID: 36770020
Free PMC article.
Review.
Wet-Oxidation-Assisted Chemical Mechanical Polishing and High-Temperature Thermal Annealing for Low-Loss 4H-SiC Integrated Photonic Devices.
Shi X, Lu Y, Chaussende D, Rottwitt K, Ou H.
Shi X, et al.
Materials (Basel). 2023 Mar 14;16(6):2324. doi: 10.3390/ma16062324.
Materials (Basel). 2023.
PMID: 36984202
Free PMC article.
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