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Artificial-Neural-Network-Driven Innovations in Time-Varying Process Diagnosis of Low-K Oxide Deposition.
Sensors (Basel). 2023 Oct 2;23(19):8226. doi: 10.3390/s23198226.
Sensors (Basel). 2023.
PMID: 37837056
Free PMC article.
Enhancing Si3N4 Selectivity over SiO2 in Low-RF Power NF3-O2 Reactive Ion Etching: The Effect of NO Surface Reaction.
Tung NH, Lee H, Dinh DK, Kim DW, Lee JY, Eom GW, Kim HU, Kang WS.
Tung NH, et al.
Sensors (Basel). 2024 May 13;24(10):3089. doi: 10.3390/s24103089.
Sensors (Basel). 2024.
PMID: 38793941
Free PMC article.
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