High-Precision Regulation of Nano-Grating Linewidth Based on ALD.
Zhang Y, Wang C, Jing W, Wang S, Zhang Y, Zhang L, Zhang Y, Zhu N, Wang Y, Zhao Y, Lin Q, Jiang Z.
Zhang Y, et al. Among authors: zhu n.
Micromachines (Basel). 2022 Jun 24;13(7):995. doi: 10.3390/mi13070995.
Micromachines (Basel). 2022.
PMID: 35888812
Free PMC article.