Correction: Integrated silicon photonic MEMS.
Quack N, Takabayashi AY, Sattari H, Edinger P, Jo G, Bleiker SJ, Errando-Herranz C, Gylfason KB, Niklaus F, Khan U, Verheyen P, Mallik AK, Lee JS, Jezzini M, Zand I, Morrissey P, Antony C, O'Brien P, Bogaerts W.
Quack N, et al. Among authors: niklaus f.
Microsyst Nanoeng. 2024 Jan 24;10:17. doi: 10.1038/s41378-023-00649-2. eCollection 2024.
Microsyst Nanoeng. 2024.
PMID: 38268775
Free PMC article.