A Review on Coupled Bulk Acoustic Wave MEMS Resonators.
Wang L, Wang C, Wang Y, Quan A, Keshavarz M, Madeira BP, Zhang H, Wang C, Kraft M.
Wang L, et al. Among authors: wang y, wang c.
Sensors (Basel). 2022 May 19;22(10):3857. doi: 10.3390/s22103857.
Sensors (Basel). 2022.
PMID: 35632263
Free PMC article.
Review.