High-Quality Amorphous Silicon Carbide for Hybrid Photonic Integration Deposited at a Low Temperature.
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ACS Photonics. 2023 Sep 21;10(10):3748-3754. doi: 10.1021/acsphotonics.3c00968. eCollection 2023 Oct 18.
ACS Photonics. 2023.
PMID: 37869559
Free PMC article.