Optical Temperature Sensor Based on Polysilicon Waveguides.
Xu X, Yin Y, Sun C, Li L, Lin H, Tang B, Zhang P, Chen C, Zhang D.
Xu X, et al. Among authors: zhang p, zhang d.
Sensors (Basel). 2022 Dec 1;22(23):9357. doi: 10.3390/s22239357.
Sensors (Basel). 2022.
PMID: 36502058
Free PMC article.