Focused electron beam induced etching of titanium with XeF2.
Schoenaker FJ, Córdoba R, Fernández-Pacheco R, Magén C, Stéphan O, Zuriaga-Monroy C, Ibarra MR, De Teresa JM.
Schoenaker FJ, et al. Among authors: stephan o.
Nanotechnology. 2011 Jul 1;22(26):265304. doi: 10.1088/0957-4484/22/26/265304. Epub 2011 May 18.
Nanotechnology. 2011.
PMID: 21586811