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Super-Resolution Nanolithography of Two-Dimensional Materials by Anisotropic Etching.
Danielsen DR, Lyksborg-Andersen A, Nielsen KES, Jessen BS, Booth TJ, Doan MH, Zhou Y, Bøggild P, Gammelgaard L. Danielsen DR, et al. Among authors: nielsen kes. ACS Appl Mater Interfaces. 2021 Sep 8;13(35):41886-41894. doi: 10.1021/acsami.1c09923. Epub 2021 Aug 25. ACS Appl Mater Interfaces. 2021. PMID: 34431654