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The Recent Progress of MEMS/NEMS Resonators.
Wei L, Kuai X, Bao Y, Wei J, Yang L, Song P, Zhang M, Yang F, Wang X. Wei L, et al. Among authors: song p. Micromachines (Basel). 2021 Jun 19;12(6):724. doi: 10.3390/mi12060724. Micromachines (Basel). 2021. PMID: 34205469 Free PMC article. Review.
Recent Progress of Miniature MEMS Pressure Sensors.
Song P, Ma Z, Ma J, Yang L, Wei J, Zhao Y, Zhang M, Yang F, Wang X. Song P, et al. Micromachines (Basel). 2020 Jan 1;11(1):56. doi: 10.3390/mi11010056. Micromachines (Basel). 2020. PMID: 31906297 Free PMC article. Review.
The Fabrication of Micro/Nano Structures by Laser Machining.
Yang L, Wei J, Ma Z, Song P, Ma J, Zhao Y, Huang Z, Zhang M, Yang F, Wang X. Yang L, et al. Among authors: song p. Nanomaterials (Basel). 2019 Dec 16;9(12):1789. doi: 10.3390/nano9121789. Nanomaterials (Basel). 2019. PMID: 31888222 Free PMC article. Review.
4,264 results