Understanding the Effect of Top Electrode on Ferroelectricity in Atomic Layer Deposited Hf0.5Zr0.5O2 Thin Films.
Wang X, Wen Y, Wu M, Cui B, Wu YS, Li Y, Li X, Ye S, Ren P, Ji ZG, Lu HL, Wang R, Zhang DW, Huang R.
Wang X, et al. Among authors: ye s.
ACS Appl Mater Interfaces. 2023 Mar 29;15(12):15657-15667. doi: 10.1021/acsami.2c22263. Epub 2023 Mar 16.
ACS Appl Mater Interfaces. 2023.
PMID: 36926843