Phase evolution of ultra-thin Ni silicide films on CF4 plasma immersion ion implanted Si.
Zhao LT, Liu M, Ren QH, Liu CH, Liu Q, Chen LL, Spiegel Y, Torregrosa F, Yu W, Zhao QT.
Zhao LT, et al. Among authors: liu ch, liu m, liu q.
Nanotechnology. 2020 May 15;31(20):205201. doi: 10.1088/1361-6528/ab6d21. Epub 2020 Jan 17.
Nanotechnology. 2020.
PMID: 31952059