In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon.
Tokel O, Turnali A, Makey G, Elahi P, Çolakoğlu T, Ergeçen E, Yavuz Ö, Hübner R, Borra MZ, Pavlov I, Bek A, Turan R, Kesim DK, Tozburun S, Ilday S, Ilday FÖ.
Tokel O, et al. Among authors: bek a.
Nat Photonics. 2017 Oct;11(10):639-645. doi: 10.1038/s41566-017-0004-4. Epub 2017 Sep 29.
Nat Photonics. 2017.
PMID: 28983323
Free PMC article.