A magnetically controlled chemical-mechanical polishing (MC-CMP) approach for fabricating channel-cut silicon crystal optics for the High Energy Photon Source.
Hong Z, Diao Q, Xu W, Yuan Q, Yang J, Li Z, Jiang Y, Zhang C, Zhang D, Liu F, Zhang X, Liu P, Tao Y, Sheng W, Li M, Zhao Y.
Hong Z, et al. Among authors: li z, li m.
J Synchrotron Radiat. 2023 Jan 1;30(Pt 1):84-89. doi: 10.1107/S1600577522011122. Epub 2023 Jan 1.
J Synchrotron Radiat. 2023.
PMID: 36601929
Free PMC article.