Scalable integration of hybrid high-κ dielectric materials on two-dimensional semiconductors.
Xu Y, Liu T, Liu K, Zhao Y, Liu L, Li P, Nie A, Liu L, Yu J, Feng X, Zhuge F, Li H, Wang X, Zhai T.
Xu Y, et al. Among authors: zhao y.
Nat Mater. 2023 Sep;22(9):1078-1084. doi: 10.1038/s41563-023-01626-w. Epub 2023 Aug 3.
Nat Mater. 2023.
PMID: 37537352