Ultrahigh-reflective optical thin films prepared by reactive magnetron sputtering with RF-induced substrate bias.
Chung TH, Zou XL, Zhang QH, Wang M, Zhu XQ, Zhang MX, Lin QC, Liao R, Cui XY, Zhang J, Xu P, Dai HN, Chen YA, Huo YH, Pan JW.
Chung TH, et al. Among authors: zou xl.
Rev Sci Instrum. 2024 Apr 1;95(4):045107. doi: 10.1063/5.0169714.
Rev Sci Instrum. 2024.
PMID: 38564326