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Roughness measurement and ion-beam polishing of super-smooth optical surfaces of fused quartz and optical ceramics.
Opt Express. 2014 Aug 25;22(17):20094-106. doi: 10.1364/OE.22.020094.
Opt Express. 2014.
PMID: 25321219
Free article.
Ion-beam polishing of fused silica substrates for imaging soft x-ray and extreme ultraviolet optics.
Chkhalo NI, Churin SA, Mikhaylenko MS, Pestov AE, Polkovnikov VN, Salashchenko NN, Zorina MV.
Chkhalo NI, et al. Among authors: churin sa.
Appl Opt. 2016 Feb 20;55(6):1249-56. doi: 10.1364/AO.55.001249.
Appl Opt. 2016.
PMID: 26906575
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