Nucleation and Layer Closure Behavior of Iridium Films Grown Using Atomic Layer Deposition.
Chung HK, Kim H, Jeon J, Kim SC, Won SO, Harada R, Tsugawa T, Chung YJ, Baek SH, Park TJ, Kim SK.
Chung HK, et al. Among authors: kim sc, kim h, kim sk.
J Phys Chem Lett. 2023 Jul 20;14(28):6486-6493. doi: 10.1021/acs.jpclett.3c01369. Epub 2023 Jul 13.
J Phys Chem Lett. 2023.
PMID: 37439679