Bearingless Inertial Rotational Stage for Atomic Force Microscopy

Micromachines (Basel). 2024 Jul 11;15(7):903. doi: 10.3390/mi15070903.

Abstract

We introduce a novel rotational stage based on inertial motion, designed to be lightweight, compact, and fully compatible with atomic force microscopy (AFM) systems. Our characterization of this stage demonstrates high angular precision, achieving a maximum rotational speed of 0.083 rad/s and a minimum angular step of 11.8 μrad. The stage exhibits reliable performance, maintaining continuous operation for extended periods. When tested within an AFM setup, the stage deliveres excellent results, confirming its efficacy for scanning probe microscopy studies.

Keywords: AFM; nanotechnology; piezoelectric inertial motion; positioning; rotational stage.

Grants and funding

This research was funded by the Spanish Ministry of Science, Innovation and Universities & the State Research Agency MICIU/AEI/10.13039/501100011033, through the grant numbers PID2022-138908NB-C32, TED2021-132219A-I00, PID2022-142331NB-I00, CNS2023-143713, Ramón y Cajal fellowship RYC2020-030302-I, and “María de Maeztu” Programme for Units of Excellence in R&D (CEX2023-001316-M).