Correction: Integrated silicon photonic MEMS

Microsyst Nanoeng. 2024 Jan 24:10:17. doi: 10.1038/s41378-023-00649-2. eCollection 2024.

¹ École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland.
² School of Aerospace, Mechanical and Mechatronic Engineering, The University of Sydney, Camperdown, NSW 2006 Australia.
³ Swiss Center for Electronics and Microtechnology (CSEM), 2002 Neuchâtel, Switzerland.
⁴ Division of Micro and Nanosystems, KTH Royal Institute of Technology, 114 28 Stockholm, Sweden.
⁵ Department of Information Technology, Photonics Research Group, Ghent University - IMEC, Technologiepark-Zwijnaarde 126, 9052 Gent, Belgium.
⁶ imec vzw. 3DSIP Department, Si Photonics Group, Kapeldreef 75, 3001 Leuven, Belgium.
⁷ Tyndall National Institute, Lee Maltings Complex Dyke Parade, Cork, T12 R5CP Ireland.

Abstract

[This corrects the article DOI: 10.1038/s41378-023-00498-z.].

Keywords: NEMS; Nanoscale devices; Other photonics.