Mid-infrared hyperspectral sensor based on MEMS Fabry-Pérot interferometer for stand-off sensing applications

Sci Rep. 2022 Nov 12;12(1):19392. doi: 10.1038/s41598-022-23758-w.

Abstract

We report a novel hyperspectral sensor employing a Fabry-Pérot interferometer based on micro-electro-mechnical system and a custom mid-infrared supercontinuum laser. The Fabry-Pérot interferometer allows on-axis filtering, of spectral components of supercontinuum light backscattered from a target, with a spectral resolution of about 25 nm. We demonstrated hyperspectral identification of black polypropylene (PP) and polyethylene (PE500) using the 3-3.5 [Formula: see text]m region of the supercontinuum spectrum and a corresponding measurement rate of 62.5 spectra / s. The resulted spectra show excellent agreement with the reference based on an FTIR spectrometer. Furthermore, we showed that the coloring of the plastics has no effect on their identification at this wavelength range.