In this study, we examined the beam-irradiation effect on the structural evolution of the grain boundary (GB) in a Cu bicrystal at room temperature using a Cs-corrected, monochromated transmission electron microscope at an acceleration voltage of 300 keV. Faceting of the GB was observed at a low current density of the electron beam. With increasing current density, the GB became defaceted. The faceting-roughening transition was shown to be reversible, as the process was reversed upon decreasing the current density. The structural transition is explained by inelastic scattering effects by electron-beam irradiation.
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