Development of Amorphous SIZO/Ag/Amorphous SIZO Multilayer for High-Performance Transparent Conducting Electrode by Controlling Ag Layer Thickness

Byoung Keun Kim; Sang Yeol Lee

doi:10.1166/jnn.2019.16254

Development of Amorphous SIZO/Ag/Amorphous SIZO Multilayer for High-Performance Transparent Conducting Electrode by Controlling Ag Layer Thickness

J Nanosci Nanotechnol. 2019 Mar 1;19(3):1755-1758. doi: 10.1166/jnn.2019.16254.

Authors

Byoung Keun Kim¹, Sang Yeol Lee¹

Affiliation

¹ Department of Semiconductor Engineering, Cheongju University, Cheongju, Chungbuk 28503, Republic of Korea.

PMID: 30469260
DOI: 10.1166/jnn.2019.16254

Abstract

A multilayered transparent conductive film of amorphous SiInZnO/Ag/amorphous SiInZnO (SIZO/Ag/SIZO) was fabricated and characterized. The electrical and optical properties of the multilayers changed with changes in the Ag film thickness. The electrodes with the optimized thickness showed an excellent average transmittance (T_av) of 94.04% and a high figure of merit (FOM) of 38.1×10^-3 Ω^-1. As the Ag layer thickness increased over 9 nm, the FOM and sheet resistance decreased. This result could be attributed to the decrease in T_av due to light absorption and reflection from the thick Ag layer.