Rear-Sided Passivation by SiNx:H Dielectric Layer for Improved Si/PEDOT:PSS Hybrid Heterojunction Solar Cells

Yiling Sun; Pingqi Gao; Jian He; Suqiong Zhou; Zhiqin Ying; Xi Yang; Yong Xiang; Jichun Ye

doi:10.1186/s11671-016-1505-7

Rear-Sided Passivation by SiNx:H Dielectric Layer for Improved Si/PEDOT:PSS Hybrid Heterojunction Solar Cells

Nanoscale Res Lett. 2016 Dec;11(1):310. doi: 10.1186/s11671-016-1505-7. Epub 2016 Jun 28.

Authors

Yiling Sun^{1

2}, Pingqi Gao², Jian He², Suqiong Zhou², Zhiqin Ying², Xi Yang², Yong Xiang³, Jichun Ye⁴

Affiliations

¹ School of Energy Science and Engineering, University of Electronic Science and Technology of China, Chengdu, 611731, People's Republic of China.
² Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, People's Republic of China.
³ School of Energy Science and Engineering, University of Electronic Science and Technology of China, Chengdu, 611731, People's Republic of China. xiang@uestc.edu.cn.
⁴ Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, People's Republic of China. jichun.ye@nimte.ac.cn.

Abstract

Silicon/organic hybrid solar cells have recently attracted great attention because they combine the advantages of silicon (Si) and the organic cells. In this study, we added a patterned passivation layer of silicon nitride (SiNx:H) onto the rear surface of the Si substrate in a Si/poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (

Pedot: PSS) hybrid solar cell, enabling an improvement of 0.6 % in the power conversion efficiency (PCE). The addition of the SiNx:H layer boosted the open circuit voltage (V oc) from 0.523 to 0.557 V, suggesting the well-passivation property of the patterned SiNx:H thin layer that was created by plasma-enhanced chemical vapor deposition and lithography processes. The passivation properties that stemmed from front

Pedot: PSS, rear-SiNx:H, front

Pedot: PSS/rear-SiNx:H, etc. are thoroughly investigated, in consideration of the process-related variations.

Keywords: Hybrid solar cells; Photolithography; Si/PEDOT:PSS; SiNx:H passivation.