Thermometry of a high temperature high speed micro heater

M Xu; G Slovin; J Paramesh; T E Schlesinger; J A Bain

doi:10.1063/1.4942249

Thermometry of a high temperature high speed micro heater

Rev Sci Instrum. 2016 Feb;87(2):024904. doi: 10.1063/1.4942249.

Authors

M Xu¹, G Slovin¹, J Paramesh¹, T E Schlesinger², J A Bain¹

Affiliations

¹ Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania 15213, USA.
² Department of Electrical and Computer Engineering, Johns Hopkins University, Baltimore, Maryland 21218, USA.

PMID: 26931881
DOI: 10.1063/1.4942249

Abstract

A high temperature high-speed tungsten micro heater was fabricated and tested for application in phase change switches to indirectly heat and transform phase change material. Time domain transmissometry was used to measure heater temperature transients for given electrical inputs. Finite element modeling results on heater temperature transients show a good consistency between experiments and simulations with 0.2% mismatch in the best case and 13.1% in the worst case. The heater described in this work can reliably reach 1664 K at a rate of 1.67 × 10(10) K/s and quench to room temperature with a thermal RC time constant (time for T to fall by a factor of e) of less than 40 ns.