Conditions for high yield of selective-area epitaxy InAs nanowires on SiO x /Si(111) substrates

Nanotechnology. 2015 Nov 20;26(46):465301. doi: 10.1088/0957-4484/26/46/465301. Epub 2015 Oct 28.

Abstract

Experimental data and a model are presented which define the boundary values of V/III flux ratio and growth temperature for droplet-assisted nucleation of InAs semiconductor nanowires in selective-area epitaxy on SiO(x)/Si (111) substrates by molecular beam epitaxy. Within these boundaries, the substrate receives a balanced flux of group III and V materials allowing the growth of vertically oriented nanowires as compared to the formation of droplets or crystallites.

Publication types

  • Research Support, Non-U.S. Gov't