Development of very small-diameter, inductively coupled magnetized plasma device

D Kuwahara; A Mishio; T Nakagawa; S Shinohara

doi:10.1063/1.4823524

Development of very small-diameter, inductively coupled magnetized plasma device

Rev Sci Instrum. 2013 Oct;84(10):103502. doi: 10.1063/1.4823524.

Authors

D Kuwahara¹, A Mishio, T Nakagawa, S Shinohara

Affiliation

¹ Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo 184-8588, Japan.

PMID: 24182105
DOI: 10.1063/1.4823524

Abstract

In order to miniaturize a high-density, inductively coupled magnetized plasma or helicon plasma to be applied to, e.g., an industrial application and an electric propulsion field, small helicon device has been developed. The specifications of this device along with the experimental results are described. We have succeeded in generating high-density (~10(19) m(-3)) plasmas using quartz tubes with very small diameters of 10 and 20 mm, with a radio frequency power ~1200 and 700 W, respectively, in the presence of the magnetic field less than 1 kG.