Nanoporous Pt thin films were prepared by simultaneous deposition of Pt and Si and subsequent dealloying of Si out of the Pt(x)Si(1-x) films. The x values were easily controlled in the range of 0.10 to 0.90 by the distances between the sample position and the target positions and by the plasma power for the targets. With a roughness factor of around 40, the nanoporous Pt films showed enough sensitivity, selectivity, and detection limit for glucose and interfering species. Multiple nanoporous Pt films with similar roughness factors were easily fabricated using this method, which showed good enough and similar performance to other reported glucose sensors, suggesting a simple and quality controlled manufacturing method for nanoporous Pt films as nonenzymatic glucose sensors.