Polymerization inhibition by triplet state absorption for nanoscale lithography
Adv Mater
.
2013 Feb 13;25(6):904-9.
doi: 10.1002/adma.201204141.
Epub 2013 Jan 9.
Authors
Benjamin Harke
1
,
William Dallari
,
Giulia Grancini
,
Daniele Fazzi
,
Fernando Brandi
,
Annamaria Petrozza
,
Alberto Diaspro
Affiliation
1
Department of Nanophysics, Istituto Italiano di Tecnologia-IIT, Via Morego 30, 16163 Genova, Italy. benjamin.harke@iit.it
PMID:
23303534
PMCID:
PMC3594812
DOI:
10.1002/adma.201204141
No abstract available