A novel urea coupling agent possessing a vinyl-terminal group and trimethoxysilyl anchoring group was synthesized and grafted onto SiO(2)/Au substrates. This ureido coupling agent exhibits a good capacity to directly yield homogeneous SAMs with a surface smoothing. Polarization modulation infrared reflection-absorption spectroscopy (PM-IRRAS) was used to monitor these SAMs. Indeed, the different functional groups (alkyl chain, urea, and vinyl) of this coupling agent were clearly observed in the PM-IRRAS spectra. Chemical modifications of the terminal function for the covalent immobilization of biomolecules were monitored by PM-IRRAS for the first time. We have demonstrated the successful reactions of the conversion of the vinyl-terminated SAMs successively into SAM-COOH and SAM-NHS without any degradation of the monolayer. The reactivity of activated esters was successfully investigated in order to immobilize the protein A.