Three dimensionally ordered macroporous (3DOM) silicon films have been made via ordered polystyrene (PS) templates by electrodeposition from an ionic liquid (IL). For this purpose, the ionic liquid 1-butyl-1-methylpyrrolidinium bis(trifluoromethylsulfonyl)amide ([Py(1,4)]Tf(2)N) with SiCl(4) dissolved in it was used as an electrolyte and the electrodeposition of macroporous silicon could be achieved at room temperature (~20 °C). Self-assembled PS colloidal crystals with different diameters were used as templates. Scanning electron microscopy and X-ray photoelectron spectroscopy confirm the quality of the samples, and the optical transmission measurement demonstrates that the 3DOM silicon film has a bandgap in the near infrared regime. Such a material has the potential to make 3DOM silicon feasible for electrical and optical applications.
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