Rapid prototyping of microstructures in polydimethylsiloxane (PDMS) by direct UV-lithography

Lab Chip. 2011 Apr 7;11(7):1368-71. doi: 10.1039/c0lc00567c. Epub 2011 Feb 16.

Abstract

Microstructuring of polydimethylsiloxane (PDMS) is a key step for many lab-on-a-chip (LOC) applications. In general, the structure is generated by casting the liquid prepolymer against a master. The production of the master in turn calls for special equipment and know how. Furthermore, a given master only allows the reproduction of the defined structure. We report on a simple, cheap and practical method to produce microstructures in already cured PDMS by direct UV-lithography followed by chemical development. Due to the available options during the lithographic process like multiple exposures, the method offers a high design flexibility granting easy access to complex and stepped structures. Furthermore, no master is needed and the use of pre-cured PDMS allows processing at ambient (light) conditions. Features down to approximately 5 µm and a depth of 10 µm can be realised. As a proof of principle, we demonstrate the feasibility of the process by applying the structures to various established soft lithography techniques.

MeSH terms

  • Dimethylpolysiloxanes / chemistry*
  • Microtechnology / methods*
  • Photolysis
  • Printing / methods*
  • Time Factors
  • Ultraviolet Rays*

Substances

  • Dimethylpolysiloxanes
  • baysilon