EUV efficiency of a 6000-grooves mm(-1) diffraction grating

Appl Opt. 1990 May 1;29(13):1866-7. doi: 10.1364/AO.29.001866.

Abstract

We present measurements of the efficiency and large-angle scattering of a very high line density, mechanically ruled,planar, uniform line-space diffraction grating at extreme ultraviolet wavelengths.