Derivation of surface macroroughness parameters of a random rough surface from an optical interferometric measurement

Appl Opt. 1988 Mar 1;27(5):983-6. doi: 10.1364/AO.27.000983.

Abstract

A new technique for the measurement of surface roughness based on the intensity fluctuations of laser light backscattered from a moving surface has been introduced. Using a statistical model describing surface macroroughness, the possibility of inversion of optically measured data to geometrical surface profile parameters is investigated.