Parylene-based encapsulated fluid MEMS sensors

Annu Int Conf IEEE Eng Med Biol Soc. 2009:2009:1039-41. doi: 10.1109/IEMBS.2009.5334826.

Abstract

A new class of transducers based on a Parylene C encapsulated fluid element are introduced. These versatile units have thus far been explored as impedance-based contact sensors and electrolysis-based actuators for fine positioning of neural recording electrodes. These sensors may be fabricated on thin, flexible substrates which permits application on non-planar or three dimensional surfaces. Another interesting modality is the coupling of individual mechanically-responsive, impedance-based sensing elements distributed over a surface but interconnected through microfluidic channel networks in a manner that emulates mechanotransduction in natural biological systems. These fluidic elements offer interesting new possibilities in neural prosthetics.

Publication types

  • Research Support, Non-U.S. Gov't
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Biosensing Techniques / instrumentation*
  • Electrodes*
  • Equipment Design
  • Equipment Failure Analysis
  • Micro-Electrical-Mechanical Systems / instrumentation*
  • Microfluidic Analytical Techniques / instrumentation*
  • Polymers / chemistry*
  • Reproducibility of Results
  • Sensitivity and Specificity
  • Transducers*
  • Xylenes / chemistry*

Substances

  • Polymers
  • Xylenes
  • parylene