Selective surface patterning with an electric discharge in the fabrication of microfluidic structures

Angew Chem Int Ed Engl. 2008;47(39):7442-5. doi: 10.1002/anie.200801569.
No abstract available

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Electrons*
  • Microfluidic Analytical Techniques / methods*
  • Microscopy, Atomic Force
  • Microscopy, Electron, Scanning
  • Silicon / chemistry
  • Spectroscopy, Fourier Transform Infrared
  • Surface Properties
  • Water / chemistry

Substances

  • Water
  • Silicon