The influence of several sterilization processes (autoclaving, gamma-ray irradiation, ethylene oxide exposure and Ar/H(2) low pressure plasma treatment) on the surface chemistry and the bioadhesive properties of thin films (thickness approximately 20 nm) of plasma-polymerized diethylene glycol dimethyl ether has been studied. X-ray photoelectron spectroscopy (XPS) analysis and cell proliferation tests were used to characterize the surfaces. The XPS results revealed in all cases a change in the surface chemistry of the layer after sterilization, whereas the conservation of non-bioadhesive properties of the coating depends on the type of sterilization process. In particular, the low pressure plasma-based sterilization technique leads to a loss of the non-bioadhesive properties of the plasma coating, whereas the coatings are resistant to the other standard decontamination techniques. This property makes them suitable for biomedical applications, provided that an appropriate sterilization process is selected.