We present a microfabricated nebulizer chip for combining atmospheric pressure photoionization-mass spectrometry (APPI-MS) with gas chromatography (GC) or capillary liquid chromatography (capLC). The chip consists of a silicon plate and a glass plate or two glass plates. The chip includes a sample inlet channel, auxiliary gas and dopant inlet, vaporizer channel, nozzle, and platinum heater. The sample eluted from the capLC or GC is mixed with auxiliary gas and dopant (toluene) in the heated vaporizer. The chip forms a confined jet of the sample vapor, which is photoionized as it exits the chip. The analytical performance of GC- and capLC-microchip APPI-MS was evaluated with some polycyclic aromatic hydrocarbons, amphetamines, and steroids. The GC-muAPPI-MS method provides high sensitivity down to 0.8 fmol, repeatability (RSD = 7.5-14%), and linearity (r = 0.9952-0.9987). The capLC-muAPPI-MS method shows high sensitivity down to 1 fmol, good repeatability (RSD = 3.6-8.1%), and linearity (r = 0.9989-0.9992).