Characteristics of (1010) and (1120) textured ZnO piezofilms for a shear mode resonator in the VHF-UHF frequency ranges

IEEE Trans Ultrason Ferroelectr Freq Control. 2005 Nov;52(11):2140-5. doi: 10.1109/tuffc.2005.1561685.

Abstract

This paper reports the fabrication and characterization of ZnO piezoelectric thin films in which the crystallite c-axis is unidirectionally aligned in the plane. The films were deposited by a conventional radio frequency (RF) magnetron sputtering apparatus without epitaxy. We have measured reflection coefficient S11 of the ZnO film/glass substrate composite shear mode resonator and confirmed that the resonator excites shear wave only in the very high frequency to ultra high frequency ranges (VHF-UHF). The crystallites c-axis orientation and alignment were determined by x-ray diffraction (XRD) patterns, phi-scan pole figure analysis, omega-scan rocking curves, and atomic force microscope (AFM) measurement. The transduction of the shear wave showed good agreement with properties of the crystallite alignment in the film.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Ceramics / chemistry
  • Ceramics / radiation effects
  • Computer Simulation
  • Equipment Design
  • Equipment Failure Analysis
  • Membranes, Artificial
  • Models, Theoretical
  • Radio Waves
  • Reproducibility of Results
  • Sensitivity and Specificity
  • Shear Strength
  • Stress, Mechanical
  • Transducers*
  • Ultrasonography / instrumentation*
  • Ultrasonography / methods
  • Zinc Oxide / chemistry*
  • Zinc Oxide / radiation effects

Substances

  • Membranes, Artificial
  • Zinc Oxide