Ozone treatment is an efficient economical, alternative method for surface activation of poly(dimethylsiloxane) (PDMS). This is illustrated by the derivatization of a PDMS surface with (3-aminopropyl)triethoxysilane (APTES). The apparent surface concentration of amino groups was found to be ca. 10(-8) mol/cm2 using UV/visible spectroscopy of the product from the reaction of the amino groups and fluorescamine. Potential application for micropatterning of biologically active interfaces was demonstrated by the covalent immobilization of oligonucleotides. A simple process for photolithographic patterning on PDMS surfaces has been developed.