Application of selective implantation in Al0.5Ga0.5As/In0.25Ga0.75As/GaAs pseudomorphic single quantum wire structures

J Nanosci Nanotechnol. 2001 Dec;1(4):389-92. doi: 10.1166/jnn.2001.064.

Abstract

A pseudomorphic Al0.5Ga0.5As/In0.25Ga0.75As/GaAs asymmetric quantum wire (QWR) structure was grown on GaAs V-grooved substrate by low pressure metal organic vapor phase epitaxy. The formation of crescent shaped QWRs at the bottom of the V-grooves was confirmed by both transmission electron microscopy and photoluminescence (PL) spectra. The temperature dependence of PL spectra demonstrated a fast decrease of the sidewall quantum well PL intensity with increasing temperature, which originates from relaxation of carriers from well to wire region. The self-aligned dual implantation technique was successfully used to selectively disable the adjacent quantum structures. Decrease of the PL intensity of QWR at 8 K was observed after selective implantation, which resulted from a decreased number of carriers relaxed from adjacent quantum structures.

Publication types

  • Comparative Study
  • Evaluation Study
  • Research Support, Non-U.S. Gov't

MeSH terms

  • Aluminum / chemistry*
  • Aluminum / radiation effects
  • Arsenicals / chemical synthesis
  • Arsenicals / chemistry*
  • Arsenicals / radiation effects
  • Crystallization / methods*
  • Electric Wiring
  • Gallium / chemistry*
  • Gallium / radiation effects
  • Indium / chemistry
  • Indium / radiation effects
  • Ions
  • Luminescence
  • Molecular Conformation
  • Nanotechnology / methods*
  • Photochemistry / methods
  • Semiconductors
  • Temperature
  • Volatilization

Substances

  • Arsenicals
  • Ions
  • Indium
  • gallium arsenide
  • Gallium
  • Aluminum