Looking at trace impurities on silicon wafers with synchrotron radiation

Anal Chem. 2002 Dec 1;74(23):608A-616A. doi: 10.1021/ac022159v.
No abstract available

MeSH terms

  • Semiconductors / standards
  • Silicon / standards*
  • Surface Properties
  • Synchrotrons*
  • Transistors, Electronic / standards
  • X-Rays

Substances

  • Silicon